The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP
Online ISSN : 2424-3140
2007
Session ID : 1113
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1113 Study on active aberration free micro actuator mechanisms for multilayer optical disks
Hironobu MESAKANorio TAGAWAAtsunobu MORIFuminori TANAKAManabu MURAYAMAShigeo MAEDA
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Abstract
In advanced information technology, large amount of data is handled and it is necessary to develop ultra-high density data storage devices. So far, many innovative technologies have been proposed in order to increase the recording density of optical disk storage devices. Multilayer optical disk is one of the high-density technologies. This technology, however, has serious technological issues related to optical aberration for multilayered disk media. This paper proposes MEMS-Based aberration free mirror micro actuators using PZT thin films. In this paper, the fundamental design of the proposed MEMS-based micro mirror actuator mechanism is studied and the fabrication process of the mirror actuator is developed.
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© 2007 The Japan Society of Mechanical Engineers
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