IIP情報・知能・精密機器部門講演会講演論文集
Online ISSN : 2424-3140
セッションID: 1117
会議情報
1117 静電駆動型DMの開発 : 第1報:DMを用いた波面補償システム(要旨講演,マイクロメカトロニクス)
川島 浩幸小林 亮夫斉藤 紀子中西 美智子丸山 弘毅
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会議録・要旨集 フリー

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For high-resolution retinal camera, we have developed an adaptive optical system with a silicon-membrane deformable mirror (DM), which is electrostatically actuated by 85 electrodes. The square voltages applied to the electrodes are mathematically calculated by a linear combination of base templates, each of that approximately forms a specific Zernike-modal shape. We present a derivation method how to obtain new templates. The suitable coefficients for the template combination are derived by the least-squares method. By using the method, we have successfully improved the wavefront compensation performance in the adaptive optics with the DM.
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© 2007 一般社団法人 日本機械学会
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