抄録
This paper proposes a new composition of a 2D array SPM system using optical interference fringes for a parallel nano imaging in a large area scanning. We achieved large-scale integration with 50,000 probes fabricated with MEMS technology, and measured the optical interference patterns with CCD. We designed, fabricated, and evaluated the characteristics of the probe. We took some interference patterns by CCD and measured the position of them. We calculate the probe height using the interference displacement and compared the result with the theoretical deflection curve. As a result, these interference patterns matched the theoretical deflection curve. We found that this multi-probe chip using interference patterns is effective in measurement for a parallel nano imaging and confirmed the feasibility of a 2D array SPM system.
