Abstract
This paper describes a resin-based device to separate living cells using ultrasonic standing wave (USW). Heretofore silicon is used for USW device structure because it has high reflection property and vertical wall can be fabricated by wet etching. But the resin-based device is needed for the permeation property and simple fabrication process. First, we fabricated the SU-8 resist microchannel by photolithographic method in order to obtain the vertical side walls. Then we carried out cell sorting test using the 1μm beads. As a result, we observed the micro beads moving to acoustic nodes and different phenomenon for the silicon structure device.
