抄録
To evaluate the coverage of thin lubricant films on magnetic recording media, a new method using CAICISS (Coaxial Impact Collision Ion Scattering Spectroscopy) was proposed. In this study, we reproduced the molecularly thin lubricant films on the carbon overcoat by molecular dynamics simulation, and calculated the coverage and fluorine-to-carbon atomic ratio (F/C ratio) assuming the CAICISS measurements. From the simulation results, we confirmed that the coverage measurement method using CAICISS can evaluate the accurate coverage of molecularly thin lubricant films.