Abstract
Conventional friction force microscopes (FFM) had the disadvantage of low force sensitivity due to mechanical interference between torsion caused by friction force and caused deflection by normal force. We have developed dual-axis micro-mechanical probe. It measures the lateral force by detecting the deflection of the double cantilever and measures the vertical force by the torsion beam. However, the method of detecting the probe lateral deflection has not been established. In this study, we present a new method precisely which detects the probe lateral displacement in order to detect the friction force.
