Abstract
Composite material made of magnetic nanoparticles/SU-8 is expected to be material of microactuators which can be controlled by external magnetizing field and easily fabricated by only photolithography. In this study, we evaluated the dispersion degree of the proposed nanocomposites mixed by both a planetary stirrer and an ultrasonic stirrer. As a result, the planetary stirrer achieve higher dispersion degree than the ultrasonic one. By a magnetic driving test in a microchannel, it is confirmed that the fabricated element made of the proposed nanocomposite move with the external magnetic field applied by an electromagnet.
