P-4 Fabrication of liquid chromatography chip with micro pillar array of sub micron spacing

Abstract

We propose a micro liquid chromatography chip which has a high density pillar array of a submicron gap for the purpose of the reduction of sample volume and analysis time. Submicron gap was achieved by alternate deposition of oxide film and poly-Si to the micro pillars fabricated by Si microfabrication process. The chip was evaluated by the relationship between flow rate and gap length and the substrate dependency of surface modification. We examined the feasibility of the separation of the lysozyme using this chip.