Abstract
Recently, micro/nano fabrication techniques are applied to bio-assay for detailed biochemical analysis. For example, studies about single molecule enzymology by femtoliter PDMS chambers and real-time imaging of single molecule fluorescence in quartz nano wells are reported. But, these conventional devices for nano-bio assays have difficulties in perfusing solutions in nano structures, so we developed a simple fabrication process of sub-microchannel and microchannel by integrating nanoimprint lithography and UV lithography. The fabricated device consists of sub-microchannel array and two microchannels. These microchannels are used as inlet or outlet of sub-microchannel to deliver solutions. We achieved water injection and solution exchange in 2-μm channels. Water injection pressure was 100 kPa for 1-μm channels and 120 kPa for 2-μm channnels.
