Abstract
Recently, polymer MEMS has attracted considerable attention. In particular, control of film thickness is one of major problems for application of thick resist. In this study, we evaluated a spray coating method which can be controlled by a number of process parameters for coating thick resist. Smoothness and uniformity of the coating film and thickness reproducibility were examined in various coating conditions. Moreover, edge bead caused by surface tension of thick film was reduced by a spray coating method with a cover to the edge.
