E-1-1 Development of a magnetically-driven micropump with photosensitivity nanocomposit

Abstract

Recently,micro/nano-systems have been required to satisfy the integration,further miniaturization,and shortening fabrication process time for more complex application.In the case of micro Total Analysis Systems,many types of microfluidic components,i.e.microchannels,microvalves,micromixers,and micropumps are integrated on a chip.In this study,we propose a simple-structural micropump having a magnetically-driven diaphragm made of a photosensitive nanocomposite for an easy integration method.A fabricated micropump generated the one-directional fluid flow at the flow rate of 0.35μ1/min evaluated by using image analysis with fluorescent microscope images.