The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP
Online ISSN : 2424-3140
2013
Session ID : E-1-2
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E-1-2 Accuracy Evaluation of a Polydimethylsiloxane Replica in Soft Lithography
Hidetaka TAMAIHidekuni TAKAOFumikazu OOHIRAKyohei TERAOFusao SIMOKAWATakaaki SUZUKI
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Abstract
In micro Total Analysis Systems(μ-TAS) field,polydimethylsiloxane(PDMS) is widely used for the structural material of a microfluidic device. However,a large scale integration of the microfluidic system becomes a laborious process because of theshrinkage of PDMS at curing process.In this study,we quantitatively evaluated the shrinkage of PDMS depend on the curing temperature,the curing time and the thickness of PDMS samples.As a result,it is seen that there is correlation between total heattransfer per unit volume and the shrinkage of PDMS.Especially,the initial heat treatment has significant effect for the saturated value of the shrinkage.
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© 2013 The Japan Society of Mechanical Engineers
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