IIP情報・知能・精密機器部門講演会講演論文集
Online ISSN : 2424-3140
セッションID: E-1-2
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E-1-2 ソフトリングラフィにおけるPDMSの転写精度評価(マイクロナノメカトロニクス(1),口頭発表)
玉井 秀隆高尾 英邦大平 文和寺尾 京平下川 房男鈴木 孝明
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会議録・要旨集 フリー

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In micro Total Analysis Systems(μ-TAS) field,polydimethylsiloxane(PDMS) is widely used for the structural material of a microfluidic device. However,a large scale integration of the microfluidic system becomes a laborious process because of theshrinkage of PDMS at curing process.In this study,we quantitatively evaluated the shrinkage of PDMS depend on the curing temperature,the curing time and the thickness of PDMS samples.As a result,it is seen that there is correlation between total heattransfer per unit volume and the shrinkage of PDMS.Especially,the initial heat treatment has significant effect for the saturated value of the shrinkage.
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