Abstract
We have been developing an electret comb-drive actuator that employs silicon oxide film as an electret material.Here in this time,we will report on electrical characterization of the electret pendulum actuator as a power generator.We measured generated voltage by impulse response,and we obtained 20 mV_<pp> generated voltage when it vibrate 850 Hz.In addition,its Q factor is about 20000,this factor is much higher than conventional product.
