In recent years,many researches of a large deflection MEMS mirror having polymer hinges have been actively done.Since the polymer materials have the demerits of time and temperature dependencies of the mechanical property related to the reproducibility of the mirror position,sensing and controlling of the mirror angle are necessary for realize a stable laser scan.In this paper,we propose a polymer-MEMS mirror integrated an angular rate sensor.The mirror is electromagnetically driven by the Lorentz force,and the mirror angle is measured by the induced electromotive force of the sensor coil on the mirror.A prototype of the fabricated mirror deflected over±30 degree and generated the sensor signal at the sensor coil.So,it is possible that the proposed mirror integrated the angular rate sensor on the device is precisely driven with feedback control.
