抄録
With ultraviolet (UV) irradiation through a photomask, nanometer-thick patterned perfluoropolyether (PFPE) films were successfully formed on magnetic disks. Such patterned films feature three-dimensional and functional distributions. The effect of pattern linewidth on friction properties was investigated by using a pin-on-disk friction tester. The friction force decreased with decreasing pattern linewidth. As the pattern linewidth decreased to 0.5 μm, the lowest friction force were observed, even as compared with non- and fully-UV-irradiated films. The similar trend was obtained in our previous experiments of film depletion as a function of pattern linewidth. This indicates that fine patterning is an effective way to improve the tribological properties of nanometer-thick lubricant films.
