主催: 一般社団法人 日本機械学会
会議名: 情報・知能・精密機器部門(IIP部門)
開催日: 2016/03/14 - 2016/03/15
We successfully demonstrated the availability of TOF-SIMS (Time of flight-secondary ion mass spectroscopy) in studying the thermal decomposition of the lubricant film on magnetic head slider under heating in the vacuum chamber of TOF-SIMS. By comparing the positive mass spectrum of wide range, we found that the molecular weight distribution of lubricant changed by heating and we confirmed that the thermal decomposition of the lubricant could be accelerated by the catalysis of Al2O3.