静電駆動機構を付与したすきま制御可能な摩擦力顕微鏡プローブの開発

抄録

A probe for gap-controlled friction force microscopy (FFM) is presented. Electrodes were added to both the probe and micro electrode parts and normal electrostatic force was generated for compensation of normal force between the probe and sample. In addition, the probe had a see-saw structure and two actuators were fabricated at both ends of the probe in order to generate attractive and repulsive forces. A probe with about 30-μm electrode gaps were successfully fabricated by separately fabricating the probe and electrode parts with spacer structures and assembling them. Moreover, feasibility of gap control was experimentally confirmed.