垂直観測型エリプソメトリー顕微鏡の摺動すきま形状計測への適用

抄録

Gap measurement is essential to clarification of lubrication phenomena at nano-meter gaps; however, there are no well-established methods. We present a new method for measuring the distribution of nano-meter sliding gaps. Vertical-objective-type ellipsometric microscope (VEM) was applied to sliding gap measurements. Feasibility of the method for the nano-meter gap measurement was demonstrated.