微小すき間の流量特性

（表面粗さの影響）

抄録

The slider/disk spacing of magnetic disk drives has been reduced to less than 2nm by using the thermal flying height control system in order to increase the recording density. In narrower slider/disk spacing, the effect of surface roughness on the flow characteristics is not negligible and it may affect the flying performance of slider air bearing. We introduced Direct Simulation Monte Carlo method (DSMC), and the flow characteristics against narrow spacing with surface roughness was analyzed. The effect of surface roughness on the flow characteristics was also estimated by using molecular gas-film lubrication (MGL) equation, as well. The both results were compared and the characteristics of surface roughness effect ware examined.