RF パルス電圧を用いた光電子アシスト CVD 法による PFPE/DLC 複合膜

抄録

PFPE/DLC hybrid overcoat was deposited by the photoelectron assisted CVD (PACVD) with RF pulse bias voltage. The properties of PFPE film on DLC surface deposited by PACVD was compared with those by the CVD with the glow discharge plasma. The deposition rate of PACVD was much lower than that of the glow discharge plasma. The surface energy of PFPE films by PACVD was approximately 15 mJ/m² and that by the glow discharge plasma was 50 mJ/m², and the estimated monolayer thickness of PFPE film deposited by PACVD was 7−8 Å. The PFPE film deposited by PACVD had much CF₂ structure at the surface, however, that deposited by the glow discharge plasma had much COO and CF structures. From these results, we estimated that the glow discharge plasma much dissociated the chemical structure of monomer PFPE gas molecules as precursor and the deposited film could not show low surface energy.