水晶振動子（QCM）を用いた表面間力測定に関する基礎研究

（フォースカーブ測定における共振周波数シフトの基本特性）

抄録

Surface forces interacting between solids play an important role for small devices such as micro/nanoelectromechanical systems (MEMS/NEMS) or for industrial processes including tribological phenomena. Atomic force microscope (AFM) and surface force apparatus (SFA) are often used to measure the surface forces with ultra-high resolution. In this study, we proposed a new method of surface force measurements using the quartz crystal microbalance (QCM). Combining the surface interaction force tester and the QCM, the surface interaction forces and resonant frequency shift of the QCM were measured simultaneously. The basic characteristics of the relationships between the surface forces and the frequency shifts were obtained using the newly developed experimental system.