The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP
Online ISSN : 2424-3140
2018
Session ID : 1C04_1
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Development of FFM probe with a gap control mechanism using a electrostatic and elastic forces
*Yusuke HoriKenji FukuzawaShintaro ItohHedong Zhang
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Abstract

Friction force microscopes (FFMs) are widely used for measuring lubrication properties on the nanometer scale. In measurement of lubrication in nanometer gaps, control of the gap between the sliding probe and the sample surface is essential since lubrication properties significantly depends on the size of the gap. In this report, with the aim of realizing FFMs capable of accurate control of sliding gap, we tried to develop a probe with an actuator that utilizes electrostatic and elastic forces.

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© 2018 The Japan Society of Mechanical Engineers
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