IIP情報・知能・精密機器部門講演会講演論文集
Online ISSN : 2424-3140
セッションID: IoT_6
会議情報

カリウムイオンエレクトレット技術と振動発電素子への応用
*橋口 原
著者情報
会議録・要旨集 フリー

詳細
抄録
Potassium ion electret technique was invented in 2012 and first reported in IIP2012. This technique is able to give a semi-permanent high bias voltage to silicon MEMS devices having high aspect ratio structures. Potassium ions are introduced by thermal oxidation process, and then evacuated from the oxide by applying a voltage with heating the device at about 550 degree. Consequently, remaining negatively charged oxide defects compose a space charge region in the oxide and make a electret potential. This technique has been applied to vibration energy harvesters made of a silicon wafer and showed ability of power generation with very low acceleration and wide-band frequency response.
著者関連情報
© 2019 一般社団法人 日本機械学会
前の記事 次の記事
feedback
Top