抄録
Surface forces interacting between solids play an important role for small devices such as micro/nanoelectromechanical systems (MEMS/NEMS) or for industrial processes including tribological phenomena. Atomic force microscope (AFM) and surface force apparatus (SFA) are often used to measure the surface forces with ultra-high resolution. In this study, we proposed a new method of surface force measurements using the quartz crystal microbalance (QCM). Combining an ultrahigh precision surface force measurement apparatus and the QCM, the surface interaction forces and resonant frequency shift of the QCM were measured simultaneously. The basic characteristics of the relationships between the surface forces and the frequency shift s were obtained using the newly developed experimental system.
