圧電スピーカの設計，試作および評価に関する研究

抄録

In this study, we designed, fabricated and evaluated a piezoelectric thin-film loudspeaker. To enhance the acoustic output in the low frequency range, the device design was optimized by finite element analysis. The prototype speaker was fabricated using the piezoelectric PZT thin film deposited on a stainless steel substrate using RF magnetron sputtering. The vibration displacement and output sound pressure of the completed device were measured as a function of frequency. The measured SPL increased in proportion to the frequency below the resonance. Above the resonance frequency, the SPL was constant independent of frequency. It achieved a sound pressure level of 65 dB at the resonance frequency of 726 Hz. SPL was calculated from the displacement and we confirmed that the calculated results of the frequency response of SPL were in good agreement with the measurement results.