A MEMS Rate Integrating Gyroscope Using Virtually Rotated Control and Demonstration of the Earth's Rotation Detection

Abstract

This paper reports on a direct angle sensing rate integrating gyroscope (RIG) for high accuracy inertial navigation and automatic driving, which is characterized by high accuracy angle detection without the effect of integration error present in conventional rate gyros. On the other hand, asymmetry of frequency and damping due to manufacturing error causes two problems: detection limit of low speed rotation and cyclic angle error. In this paper, we present a method of low-speed rotation detection using "virtual rotation control," in which a constant rotation is applied by electrostatic force, as well as a correction method by modeling the angle error, and report the world's first detection of the earth's rotation using a 5 cm square module.