主催: 一般社団法人 日本機械学会
会議名: IIP2022 情報・知能・精密機器部門講演会講演論文集
開催日: 2022/03/07 - 2022/03/08
We propose a microfabrication method for UV-PDMS (ultra violet-curable polydimethylsiloxane), which can be fabricated by photolithography due to its material properties. However, the accuracy of the UV-PDMS microstructures fabricated by photolithography is inferior to that of the conventional photoresists. To improve the microfabrication accuracy of UV-PDMS, we investigated the solvent used to remove unexposed areas of photo-patterned UV-PDMS with the aim of selecting an appropriate solvent for microfabrication of UV-PDMS. The effect of the difference in solvent on the microfabrication accuracy of UV-PDMS was quantitatively evaluated.