The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP
Online ISSN : 2424-3140
2022
Session ID : IIP1R2-J04
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Fabrication of Porous Nanosheets by Continuous Nanoimprinting Lithography on Polymer Ultrathin Films
*Kanna MATSUMOTOYuta SUNAMI
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Abstract

We focused on producing porous nanosheets by using micropore processing on polymer ultrathin films (nanosheets), which are expected to be applied in the medical field. Nanosheets exhibit features such as high flexibility and high adhesiveness when the film thickness is 100 nm or less. In order to enable mass production of porous nanosheets, we adopted the roll nanoimprint method, which enables continuous processing. However, little research has been done on roll nanoimprint processing on nanosheets. In order to increase the transfer speed of the roll nanoimprint method and mass-produce porous nanosheets, it is necessary to establish a micropore processing method during low-speed transfer. Therefore, the production conditions for low-speed transfer using a calendar machine were examined while comparing with the micropore processing using a press machine. At that time, the type of nickel mold, the nanosheet material to be processed, and the clearance between the rollers were changed to perform microfabrication to produce a porous nanosheet. After preparation, observation was performed and evaluation was performed based on the presence or absence of micropores. As a result, it was found that the nanosheet material to be processed and the clearance affect the micropore processing.

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© 2022 The Japan Society of Mechanical Engineers
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