エレクトレット型MEMSスイッチを用いた超低消費電力スイッチングレギュレータの開発

抄録

This paper proposes and demonstrates an electret MEMS switching device in purpose of voltage regulation of the charging voltage to be used in a vibration power generator system. The device can be operated with almost zero current consumption; hence it will be applicable to a vibration power generating system under low current generation conditions.

We have successfully regulated the charging voltage around 14V with the MEMS switching device having 240V electret potential.