圧電薄膜を用いたフレキシブル発電端末の作製・評価

抄録

In this study, we fabricated flexible piezoelectric energy harvesters (PEHs) from Pb(ZrTi)O₃ (PZT) thin films on stainless steel foils for wearable applications. The PZT thin films were deposited on Pt/Ti-coated stainless steel substrates of 30 μm by RF-magnetron sputtering. We measured output power by large bending deformation applied to PEHs. During periodic bending motion, the maximum output power of 166.7 μW was measured from the effective area of 380 mm² at a load resistance of 80 kΩ. We also fabricated PEHs of lead-free (K_x, Na_1-x)NbO₃ (KNN) thin films on stainless steel foils and evaluated the electrical characteristics.