Development of A Mobile Absolute Tilt Angle Measurement System Using High-Accuracy T-shaped MEMS Differential Resonant Accelerometer Module

Abstract

We have developed a compact system for real-time absolute tilt angle measurement with high accuracy. The compact module of MEMS differential resonant accelerometer (DRA) that can achieve both high accuracy and wide dynamic range was utilized in the system. Using the prototype system, the tilt angle measurement with an estimated accuracy of less than 1 mdeg was realized.