高精度ＭＥＭＳ差動共振型加速度センサモジュールを用いた小型傾斜角計測システムの開発

抄録

We have developed a compact system for real-time absolute tilt angle measurement with high accuracy. The compact module of MEMS differential resonant accelerometer (DRA) that can achieve both high accuracy and wide dynamic range was utilized in the system. Using the prototype system, the tilt angle measurement with an estimated accuracy of less than 1 mdeg was realized.