固液間の分子間相互作用を用いたナノメートル分解能を有する液体膜の厚さ制御法

抄録

Thickness control of thin liquid films is useful in various fields for the control of physical properties of solid surfaces such as wettability and multilayer fabrication using light-curing resin liquid films. In this report, we propose a precise thickness control method with nanometer-order resolution using intermolecular interaction between solid and liquid, and report its experimental verification.