集合配列電極型静電チャックにおける電極支持弾性部材の形状が吸着・離脱性能に与える影響

抄録

This study investigated the influence of the shape of elastic components that support the electrodes in array-electrode-type electrostatic chucks (ESCs) by comparing two designs: one using coil springs as elastic components, referred to as the spring type, and the other featuring inclined elastic beams, referred to as the beam type. Both types exhibited equivalent maximum electrostatic adhesion forces. However, the spring type demonstrated higher isotropy of adhesion force with respect to the parallelism between the electrode surface and the gripping target surface, while the beam type showed lower isotropy. These results highlight the importance of designing the shape of elastic components and the method of posture control to meet specific requirements, such as adhesion and detachment performance and dimensional constraints, in ESC applications.