抄録
The scanning probe microscopy (SPM) is still suffering from the reproducible fabrication of the corresponding sensors for the mechanical, electrical, optical, thermal and chemical material characterisation with highest lateral and/or time resolution. For this batch fabrication technique lithographic, dry etching and material problems have to be solved. Using this techniques several types of cantilevers and tips including piezoresistive detection systems have been performed world wide for the first time.
