抄録
The DLC film on basis material is created by the plasma polymerization method, in order to investigate the friction and wear characteristic. If a gas flow and a plasma treatment power are higher, the stable film can be created with high hardness and low CV value of hardness. At this time, the membranous creation speed also became quick. As a result friction and wear characteristic of the DLC film is very excellent on a pin-on-disk examination, and it became clear that the reduction of friction and wear resistance was improved by creating DLC film on a basis material. And, the wear amount of the partner material was remarkably reduced, and the damage to partner material is also low.
