106 電子デバイス応用のための高品質ダイヤモンド膜の合成(FM-1 技術移転を目指す熱・燃焼工学最前線,研究発表講演)

抄録

The purpose of this research is to remove amorphous carbon from diamond film. We have utilized three methods, i.e., the heat treatment, the detection of optimal equivalence ratio, and the addition of hydrogen into synthesizing gas for making the high quality diamond film. These methods can remove and decrease the amorphous carbon effectively.