In this study, a new method to evaluate peel strength of the interface between film and base using energy release rate has been developed. For evaluation of peel strength of thin film, energy release rate on based linear fracture mechanics cannot be applied because the deformation of the thin film is very large. Then, energy release rate in consideration for geometrical non-linearity is calculated about disk model under inner pressure and cantilever model under mixed mode loading. Various parameters on the non-linearity which effects on energy energy release rate are examined. As a result, energy release rate in consideration for geometrical non-linearity could be used to evaluate peel strength of thin film.