Abstract
Surface acoustic wave (SAW) linear motor is a kind of ultrasonic motors. The advantages of the SAW linear motor is thin structure, high thrust force, high velocity and precise positioning. Relationship between applied voltage and output velocity, however, has non-linearity in a low-velocity area due to friction drive principle. Therefore the SAW linear motor cannot obtain stable driving without feedback control in the low-velocity area. Previously, to realize such low velocity, PWM control and flexible slider structure were employed. Flexible structure was installed to cancel vibration due to PWM carrier frequency. In this research, we change calculation algorithm for slider velocity measurement. As a result, SAW linear motor can be driven at a low velocity of 35μm/s. Additionally, driving characteristics is improved by using a feedforward controller.
