The Proceedings of Conference of Kanto Branch
Online ISSN : 2424-2691
ISSN-L : 2424-2691
2009.15
Session ID : 21113
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21113 Thermal stress enhancement and crisis of low-k material around multi-bit interconnections of operating high performance ULSI
Masafumi SuzukiHatsuhiro Kato[in Japanese][in Japanese]
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
Under the operation environment, the heat generation and the thermal stress of high performance integration circuits are considerably serious. Here, the thermal stress of low-k materials in the operating thermal environment is discussed from the point of view related to the parallel multi-bit interconnections. The maximum thermal stress of the low-k material for the multi-bit line is about four times that of the single line.
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© 2009 The Japan Society of Mechanical Engineers
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