The Proceedings of Conference of Kanto Branch
Online ISSN : 2424-2691
ISSN-L : 2424-2691
2009.15
Session ID : 21114
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21114 Fabrication of Si nano-holes and Cu fill using supercritical CO_2
Kakeru Tamai, Masahiro Matsubara, Chia Lung Lee, Michio Matsubara, Eiichi Kondoh
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Keywords: Ag nanoparticles, nano-holes, supercritical CO_2
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© 2009 The Japan Society of Mechanical Engineers
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