Abstract
This paper describes tribology in micro-scale order that is influenced by low friction force caused by low normal load. Recently, micromachines have been used in various fields. Tribolobical property in micro-scale such as micromachines move is known to be different as compared to macro-scale tribology. The aim of this research is to clarify microtribology and evaluate it. We selected diamond stylus tip and glass wafer as specimens in this research. In this experiment, friction force between two specimens is measured by using scratch tester. Besides, we observed friction groove and measured its depth with SEM. In conclusion, some knowledge about microtribology has clarified.
