Abstract
Superfinishing is one of the processing methods that can make a sliding surface of precision components with mirror surfaces. In general superfinishing, we have used a water-insoluble coolant that has high viscosity. However, smaller surface roughness than that of grind stone surfaces cannot be expected by using water-insoluble coolant because of its characteristic, i.e. grain size and materials, etc. In this study, we conducted fluid analysis and determined the pressure distribution between the grind stone and the rolling elements using water-soluble coolant. As a result, we clarified that effects of the revolution speed and the viscosity on pressure distribution are differences slightly.
