Abstract
In this study, we quantitatively evaluated the relationship between particle removal rate and particle adhesion force. First, we made cleaning samples which has particles with adhesion force more than 100 μN on plate. To achieve such samples, we sprinkled the resin particles on a glass slide and heated in order to control the particle adhesion. By changing heating temperature and time, it was possible to operate the particle adhesion force. Particle adhesion force was measured by self-sensing cantilever by removing the particles. In addition, we removed the particles by sliding single nodule of the PVA brush and colliding mono-dispersed droplets. In the experiment of sliding single nodule of the PVA brush, particle removal rate did not change by sliding velocity of nodule. On the other hand, in the experiment of colliding mono-dispersed droplets, particle removal rate increased with droplet frequency and velocity.
