The Proceedings of Conference of Kanto Branch
Online ISSN : 2424-2691
ISSN-L : 2424-2691
2017.23
Session ID : 1304
Conference information

Host: The Japan Society of Mechanical Engineers

Name : [in Japanese]

Date : March 16, 2017 - March 17, 2017

Improvement of the aspect same time exposure equipment of the hollow cylinder board using the exposure difference from the plural directions
*Kazuhiro TERAKADO, *Sumito NAGASAWA
Author information
Keywords: exposure, Hollow cylinder, plurality of direction, Ultraviolet rays, Snell's law
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© 2017 The Japan Society of Mechanical Engineers
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