Optimization of Processing Condition for Deposition of DLC using FIB-CVD Method(M^4 processes and micro-manufacturing for science)

Abstract

The processing conditions of DLC using the FIB-CVD method were examined in detail and were optimized. Microstructures and mechanical properties of DLC were also investigated. The deposition experiments with changing processing conditions indicated that the rate-determining steps of the deposition rate were varied by the probe current and heating temperature of phenanthrene. HRTEM and diffraction images showed that the DLC had amorphous structures. Young's modulus and Vickers hardness were in the range of 110-140GPa and 1100-1400HV, respectively. These mechanical properties were obtained similarly even though the deposition conditions were changed in our study.