Pattern Transfer of Sol-Gel Photocurable Polymer Using Nanoimprinting Method(M^4 processes and micro-manufacturing for science)

Abstract

The transfer characteristics of sol-gel photocurable polymer were investigated using nanoimprinting method. This polymer is a kind of thermoplastic polymer which was hardened by exposure of ultraviolet (UV) light. Using this polymer, the release before UV hardened method and the release after UV hardened method were examined. In the case of the release before UV hardened method, micrometer patterns were transferred, but nanometer patterns couldn't replicate. On the other hand, nanometer patterns were successfully obtained using the release after UV hardened method.