Nano Forming Process for Functional Surface(M^4 processes and micro-manufacturing for science)

Yuki Kinouchi; Masahiko Yoshino; Hiroyuki Miyasaka; Nayuta Minami; Tomoyuki Takahashi; Noritsugu Umehara

doi:10.1299/jsmelem.2005.2.849

2005.2

DOI https://doi.org/10.1299/jsmelem.2005.2.849

Conference information

Nano Forming Process for Functional Surface(M^4 processes and micro-manufacturing for science)

Yuki Kinouchi, Masahiko Yoshino, Hiroyuki Miyasaka, Nayuta Minami, Tomoyuki Takahashi, Noritsugu Umehara

Author information

Keywords: hard-brittle materials, nano fabrication, nano structured diamond tool, imprinting

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 849-854

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Abstract

This paper reports on nano surface fabrication of hard-brittle materials by direct imprinting method. Ultra fine structured surfaces were fabricated on soda glass. Specially designed nano indentation tester is used for the experiment. Various structured tools are developed. Imprinted mark and the ultra fine structured are analyzed for geometrical shape and processing characteristics. Also, new functional surfaces about friction properties developed by the nano fabrication process are studied.

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