Abstract
This paper proposes a new micromachining method using multi-axes vibration tool and its application to surface texturing. Firstly, hole machining of quartz glass was carried out to compare the result of single-axis vibration of φ100μm tool with that of multi-axes vibration. It was found that the brittle fracture or chipping was well prevented while improving the surface roughness with multi-axes vibration tool. Secondary, texturing was carried out applying both shallow depth of cut and the lateral feed together with the vibration. It was found that the locus was well copied to the surface.
